Method of making an interposer with contact structures

ABSTRACT

A method of making an interposer having an array of contact structures for making temporary electrical contact with the leads of a chip package. The contact structures may make contact with the leads as close as desired to the body of the chip package. Moreover, the contact structures can be adapted for making contact with leads having a very fine pitch. In one embodiment, the contact structures include raised members formed over a body of the interposer. A conductive layer is formed over each of the raised members to provide a contact surface for engaging the leads of the chip package. In another embodiment, the raised members are replaced with depressions formed into the interposer. A conductive layer is formed on an inside surface of each depression to provide a contact surface for engaging the leads of the chip package. Any combination of raised members and depressions may be used.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of application Ser. No. 10/956,804,filed Oct. 1, 2004, pending, which is a divisional of application Ser.No. 10/365,874, filed on Feb. 13, 2003, pending, which is a divisionalof application Ser. No. 09/631,253, filed on Aug. 2, 2000, now U.S. Pat.No. 6,782,613, issued Aug. 31, 2004, which is a divisional ofapplication Ser. No. 09/058,586, filed Apr. 10, 1998, now U.S. Pat. No.6,299,456, which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. The Field of the Invention

The present invention relates to structures for electrically connectingan integrated circuit to external circuitry. More particularly, thepresent invention relates to interposer structures having formed thereona plurality of conductive pillars or recesses adapted to make electricalcontact with the leads of an integrated circuit package.

2. The Relevant Technology

Frequently, after an integrated circuit is manufactured, a testingprocess is conducted on the integrated circuit by subjecting it to apreselected set of input conditions in order to measure its response orother parameters. Such testing is often conducted on a chip package thatincludes an integrated circuit. As used herein, the terms “integratedcircuit package” and “chip package” refer to an assembly that includesan integrated circuit or another semiconductor structure in combinationwith external and additional structure. The term “semiconductorstructure” extends to any device or assembly that includes circuitrydefined in a semiconductive material, and further extends to a chippackage that includes semiconductive material. The external andadditional structure of a package assembly may be used, for example, formounting the semiconductor structure to a printed circuit board or otherexternal circuitry, for establishing electrical connection between thesemiconductor structure and external circuitry, for improving the easeof handling or transporting the semiconductor structure, and/or forprotecting the semiconductor structure from environmental conditions.

Many chip packages include a lead frame that extends beyond the bodythereof. The lead frame typically includes an array of electrical leadsthat extend from the internal circuitry of the integrated circuit to theexterior portion of the chip package where they are exposed to thesurroundings. Testing of an integrated circuit package that includes alead frame assembly is conventionally conducted by providing temporaryelectrical communication between the leads and testing circuitry. Forexample, such temporary electrical connection may be established byusing a set of probes, pins, sockets, or the like, to contact the leads.The integrated circuit package may be clamped or otherwise secured inposition during the testing operation in order for the leads to remainin electrical contact with the corresponding probes, pins, sockets,etc., of the testing circuitry.

Regardless of which electrical connection technique is employed, it isdesirable to effect a connection that causes as little damage aspossible to be leads. If the temporary connection to contact surfacesdamages the leads, the entire integrated circuit package may be rendereduseless.

The trend in the semiconductor manufacturing industry is towards smallerdevices and an increase in the number of leads connected to anintegrated circuit package. This has the result of reducing the distancebetween nearest leads on an integrated circuit package. In particular,the pitch of leads, which is defined as the distance betweencorresponding points on nearest adjacent leads, has progressively grownsmaller.

As the pitch of integrated circuit packages decreases, it becomes evermore difficult to effectively and reliably establish temporaryelectrical contact with the leads without damaging the leads. Thedifficulties are compounded in light of the fact that testing isgenerally more reliable when electrical contact is made with leads asnear to the body of the integrated circuit package as possible. Ifcontact is instead made with the leads a relatively large distance fromthe body of the integrated circuit package, the resulting longconductive segments of the leads can generate considerable interferenceand noise which may disrupt the testing procedure.

Establishing electrical connection with leads near the body of theintegrated circuit package is further desirable as integrated circuitsoperate at ever higher speeds. If electrical connection is establishedat a relatively great distance from the body of a high-speed integratedcircuit package, signals are not able to be received and transmitted atthe proper synchronization or at the proper timing, which may cause theintegrated circuit to malfunction or the testing procedure to becomedisrupted.

It can be easily understood that the factors that encourage electricalconnection to be established relatively near the body of the integratedcircuit package are often in conflict with efforts for making contactwith conventional fine pitch lead frames. The probes, sockets and thelike that have been used in the prior art are often not able toadequately balance these considerations and increasingly are unable toprovide reliable electrical connection for conducting testingprocedures.

Accordingly, it can be appreciated that it would be an advancement inthe art to provide an interconnect structure that can provide electricalconnection with leads near the body of an integrated circuit package,particularly when the leads have a relatively fine pitch.

SUMMARY OF THE INVENTION

The present invention relates to interposer structures that include aplurality of contact structures formed thereon in a pattern thatcorresponds to electrical leads of an integrated circuit package. Thecontact structures are arrayed across a surface of the interposerstructure in a position so as to make electrical connection with theleads of an integrated circuit package when the integrated circuitpackage is positioned thereover. The contact structures include aconductive layer for electrically engaging the leads and an electricaltrace having a first end in contact with the conductive layer and anopposite second end configured to be connected with another conductivestructure. For example, wire bonded leads, conductive tape or non-bondedleads may be connected with the second end of the traces. These wires orleads in turn terminate at terminal contact points that preferably havea pitch greater than the pitch of the leads of the integrated circuitpackage. In this manner, relatively fine pitch leads can be connected toconventional sockets or other mounting structures on a testing devicethat have a greater pitch by means of the interposer structure.

The interposer structures of the invention include a dielectric or asemiconductor substrate over which the contact structures may be formed.The semiconductor substrate is preferably substantially composed ofsilicon or a silicon-containing material. Alternatively, a dielectricsubstrate can be formed over a semiconductor substrate. The dielectricsubstrate may be disposed over a body portion of the interposerstructure or may instead be an integral portion of the interposerstructure.

Under a first embodiment of the invention, an array of raised members isformed on the dielectric or semiconductor substrate, with each raisedmember having a top surface distal to the dielectric or semiconductorsubstrate. A conductive layer is deposited or otherwise formed on thetop surface of each of the raised members. The raised members are sizedand spaced so that the conductive layers formed thereover mayelectrically engage the leads of an integrated circuit package. Theraised members may be formed from the dielectric or semiconductorsubstrate using any suitable etching procedure or other micromachiningoperation. Silicon or silicon-containing material is a preferredmaterial for use in the dielectric or semiconductor substrate becausesuch material is relatively easy to pattern to form the raised members,as well as being scalable to relatively smaller geometries and comparedto other materials used in etching procedures or micromachiningoperations.

Optionally, one or more projecting apex structures are formed in the topsurface of the raised member, upon which is positioned the conductivelayer opposite the top surface of the raised member. The projecting apexstructures facilitate the establishment of ohmic contact with the leadsby penetrating the surface of the leads, including any oxide layer thatmay have been formed thereon.

According to a second embodiment of the invention, an interposer isprovided, wherein the raised members are replaced with an array ofdepressions formed into the dielectric or semiconductor substrate. Aconductive layer is deposited or otherwise formed on an inside surfaceof each of the depressions. The depressions are aligned and spaced sothat the leads of an integrated circuit package may be placed thereinand become electrically engaged with the conductive layers. For example,the depressions may take the form of trenches, each having alongitudinal axis parallel to the longitudinal axis of the correspondinglead. The trenches or other depressions may have one end that is openinto a nest or other low elevation region on the face of the interposerstructure. The nest may facilitate placement of the leads into thedepressions by allowing the integrated circuit package to rest low onthe interposer and near to the plane defined by the array ofdepressions.

According to either of the foregoing embodiments, electrical tracespreferably extend from the conductive layer along a surface of the bodyof the interposer structure. The traces preferably have a contact pad atone end thereof where a conductive structure such as a wire orconductive tape may be attached. Any suitable conductive structure maybe used to electrically connect the trace with external circuitry, suchas that found in a testing apparatus. For example, conductive tape maybe attached to the leads to provide an electrical path to the testingdevice. According to a preferred configuration of the interposerstructure, the conductive tape wraps around an edge of the interposerstructure and extends to a face of the interposer structure opposite thecontact structures. The conductive tape may end at a terminal contactpoint that can be connected to a conventional socket or probe.Preferably, the terminal contact points on the conductive tape are notaligned across the surface of interposer structure, but are insteadstaggered, thereby increasing the distance between adjacent terminalcontact points and increasing the pitch.

When an integrated circuit package is electrically connected to theinterposer structure, the integrated circuit package may advantageouslybe secured thereover in order to reliably establish electricalconnection. This can be accomplished by any of a number of suitablemethods. For example, a clamping apparatus may be brought into contactwith the leads or with another part of the integrated circuit package.The clamping apparatus may be a bar or a plate that is pressed onto theintegrated circuit package on the opposite side thereof from theinterposer structure. Alternatively, a vacuum source may be connected toa via that extends through the interposer structure and terminates at anend that is adjacent a portion of the body of the integrated circuitpackage. Using the vacuum source, the integrated circuit package may beheld onto the interposer structure by differences in air pressure. Inany case, when the interposer structure is used for testing anintegrated circuit, the method of securing the integrated circuitpackage onto the interposer structure is preferably temporary.

According to still another embodiment of the invention, the raisedmembers and depressions of the previous embodiments are replaced with anarray of conductive bumps. The interposer structure of this embodimentincludes a substrate over which a plurality of segments of conductivetape is positioned. A conductive bump is deposited over each segment ofconductive tape in order to provide contact surfaces for electricallyengaging the leads of the integrated circuit package.

In view of the foregoing, the interposer structures of the invention areable to establish electrical connection to leads relatively near thebody of an integrated circuit package. This is possible even insituations where the leads have a very fine pitch. Moreover, reliabletemporary electrical contact with leads can be established withoutdamaging the leads.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to illustrate the manner in which the above-recited and otheradvantages of the invention are obtained, a more particular descriptionof the invention briefly described above will be rendered by referenceto specific embodiments thereof which are illustrated in the appendeddrawings. Understanding that these drawings depict only typicalembodiments of the invention and are therefore not to be consideredlimiting of its scope, the invention will be described with additionalspecificity and detail through the use of the accompanying drawings inwhich:

FIG. 1 is a top view of an interposer structure including an array ofcontact structures according to a first embodiment of the invention.

FIG. 2 is a top view of an integrated circuit package having an array ofelectrical leads that correspond to the array of contact structures ofFIG. 1.

FIG. 3 is a bottom view of the interposer of FIG. 1. An array ofterminal contact points are arranged on segments of conductive tape.

FIG. 4 is a partial cross-sectional elevation view of an electricalcontact assembly including an integrated circuit package disposed overthe interposer structure of FIG. 1. An electrical lead of the integratedcircuit package is placed in electrical communication with externalcircuitry.

FIG. 5 is a partial cross-sectional elevation view of an alternativeconfiguration of an electrical contact assembly.

FIG. 6 is an exploded perspective view of a replaceable module thatincludes a plurality of contact structures and may be fitted onto asubstrate of an interposer structure.

FIG. 7 is a perspective view of alternative conductive structures forelectrically connecting traces with external circuitry.

FIG. 8 is perspective view of a contact structure including a raisedmember and a conductive layer having a plurality of projecting apexstructures.

FIG. 9 is a partial perspective view of an interposer structureaccording to a further embodiment of the invention, wherein the contactstructures on the interposer structure include depressions formed into asubstrate.

FIG. 10 is a partial cross-sectional elevation view of an electricalcontact assembly, including an integrated circuit package electricallyconnected to the interposer structure of FIG. 9.

FIG. 11 is a cross-sectional elevation view of an interposer structurehaving a plurality of contact structures that include both raisedmembers and depressions.

FIG. 12 is a partial cross-sectional elevation view of an electricalcontact structure wherein the interposer structure includes a segment ofconductive tape and a conductive bump formed on the conductive tapeaccording to another embodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention relates to interposer structures that may be usedfor establishing electrical connection between an integrated circuit andexternal circuitry. The interposer structures are useful for makingelectrical contact with electrical leads of an integrated circuitpackage relatively near the body of the integrated circuit package. Theinterposer structures include an array of contact structures sized andspaced so as to correspond to the leads of the integrated circuitpackage. The contact structures may be formed on the interposer with apitch small enough to accommodate the leads of substantially anyintegrated circuit.

The interposers of the invention provide electrical paths from thecontact structures to terminal contact points that may have a pitchgreater than the pitch of the leads. Accordingly, the interposers may beused to connect an integrated circuit having relatively fine pitch witha conventional socket assembly that has a larger pitch. According to theinvention, the contact structures may take any of a number of forms,including, but not limited to, raised members formed over a substrate,depressions formed into the substrate, conductive bumps formed overconductive tape, and combinations of the foregoing.

FIG. 1 illustrates an interposer 10 according to the invention.Interposer 10 preferably includes a body 12 on which other portions ofinterposer 10 are formed. Preferably, body 12 is formed by etching amaterial, such as silicon. The etching process stops once body 12assumes a desired shape. Then, a dielectric material is formed thereonso as to isolate, one from another, the discrete conductive componentsformed by the etching process. Silicon is a preferred material for body12 because of the relative ease at which it may be etched or otherwisemicromachined. Alternatively, body 12 may be composed of othermaterials, including, but not limited to, ceramics, polymers,composites, and the like. Preferably, body 12 is formed from a materialthat is rigid enough to resist significant bending and deformationduring normal use and that has a coefficient of thermal expansionrelatively close to that of the integrated circuit and the conductivematerial that are to be disposed thereover.

Preferably, a nest 14 is formed into one face of body 12 as seen inFIG. 1. Nest 14 may be useful for centering an integrated circuitpackage over body 12 and at least partially restraining lateral movementof the integrated circuit package. Nest 14 may take the form of ashallow depression or surface that has a lower elevation than thesurrounding portions of body 12. A plurality of contact structures 16 isarrayed over a face of body 12 in order to provide a conductive pathbetween the leads of an integrated circuit package and externalcircuitry. Accordingly, contact structures 16 include a contact surface18 that is positioned to electrically engage leads when the integratedcircuit package is in position over interposer 10. Contact structures 16are positioned over body 12 so as to have a pitch P₁. The pitch of anarray of contact structures is defined herein as the distance between apoint on one contact structure and the corresponding point on thenearest adjacent contact structure.

FIG. 2 depicts one example of an integrated circuit package 20 that maybe used in combination with interposer 10 of FIG. 1. Integrated circuitpackage 20 includes a body 22 that substantially encases an integratedcircuit assembly such as a semiconductor die. Body 22 is constructed of,for example, a resin or polymeric material that insulates thesemiconductor die and protects it from environmental conditions.Accordingly, the semiconductor die is not visible in FIG. 2.

The semiconductor die is attached to a lead frame which includes anarray of leads 24. The leads 24 emerge from body 22 and are therefore atleast partially exposed to the surroundings. Accordingly, leads 24 allowsignals or power to be supplied to the internal circuitry of theintegrated circuit. As seen in FIG. 2, the leads have a pitch P₂ that isdefined as the distance between a point on one lead and thecorresponding point on the nearest adjacent lead. It can be understoodthat if the contact surfaces 18 are to be placed in contact with leads24, pitch P₁ of contact structures 16 should be substantially equal topitch P₂ of leads 24. Integrated circuit package 20 has leads 24 thatemerge from body 22 at two of four edges thereof. Other integratedcircuit packages are configured differently, and have leads on as few asone edge or as many as all edges thereof.

While the embodiments disclosed herein are generally discussed inreference to their use with integrated circuit packages, it should beunderstood that the invention extends to any other chip packages andother semiconductor structures that may be temporarily connected toexternal circuitry. The specific configuration, dimensions, andcomposition of the semiconductor structures and their accompanying leadsare not critical to the invention. Indeed, the interposers of theinvention may be adapted for use with substantially any array of leadsof a chip package or semiconductor structure.

FIG. 3 illustrates the interposer 10 of FIG. 1 as viewed from theopposite side as the view of FIG. 1. In this embodiment of theinterposer, segments of conductive tape 26 extend from respectivecontact structures 16 seen in FIG. 1, wrap around the edges ofinterposer 10, and terminate on bottom face 28 seen in FIG. 3. Aterminal contact point 30, which is a site that can be connected toconventional sockets, probes, pins, or the like of a testing device orother external circuitry, is formed on each segment of conductive tape26.

The terminal contact points 30 are preferably arranged in a staggeredformation across bottom face 28. One example of a staggered formation isseen in FIG. 3, and provides that the pitch P₃ of terminal contactpoints 30 is greater than pitch P₁ of contact structures 16. Of course,terminal contact points 30 may be arranged on interposer 10 according topatterns other than that depicted in FIG. 3. Staggering the terminalcontact points across a face of the interposer or at another locationcan result in a pitch of the terminal contact points that may be atleast two to three times greater than the pitch of the contactstructures. Another factor that may contribute to the increase in pitchis that the leads 24 may diverge as seen in FIG. 1 as they extend acrossbody 12 and away from contact surfaces 18.

FIG. 4 depicts an electrical contact assembly in which an integratedcircuit package is electrically connected to external circuitry usinginterposer 10 of FIG. 1. Contact structure 16 is formed over body 12 andincludes raised member 32 that extends away from body 12. Preferably,raised member 32 is at least partially composed of a dielectric materialand projects away from body 12 to terminate at a top surface 34.Accordingly, contact structure 16 is a protruding contact structure.Raised member 32 preferably includes silicon or a silicon-containingmaterial and may be formed from the same material as body 12. Indeed,raised member 32 may be integrally formed as a part of body 12. Aconductive layer 36 is deposited or otherwise formed over top surface 34of raised member 32. Accordingly, conductive layer 36 is in a positionto electrically engage lead 24 when integrated circuit package 20 ispositioned over interposer 10.

Conductive layer 36 includes a conductive material that preferably isdurable, has good electrical properties, and can repeatedly make contactwith a lead without being significantly worn or eroded. Examples ofsuitable conductive materials include, but are not limited to, titanium,titanium silicide, beryllium, copper, tungsten, gold, palladium, andalloys or combinations of the foregoing.

A trace 38 preferably extends from conductive layer 36 over a surface ofbody 12 and/or raised member 32. Trace 38 has an end 40 that is adaptedto be connected with a conductive structure such as a wire bonded lead,conductive tape, a non-bonded lead, or the like. Trace 38 may comprisethe same conductive material as conductive layer 36 and may simply be anextension of conductive layer 36.

In the example illustrated in FIG. 4, a segment of conductive tape 26adheres to end 40 of trace 38. Conductive tape 26 wraps around an edgeof body 12 and extends to bottom face 28. In this manner, a terminalcontact point 30 may be positioned on conductive tape 26 at a locationwhere it may be connected to a probe 42 or another contact pad ontesting device 44 or any other compatible contact point on anotherexternal circuitry device. Because conductive tape is conventionallycomposed of a polymeric substrate and a conductive strip formed on oneor both faces thereof, a via 46 or another conductive path may need tobe formed through or around conductive tape 26 to access the conductivestrip.

In the embodiment of FIG. 4 and other embodiments of the invention, theconductive structures that provide a conductive path between the leadsof the integrated circuit package and external circuitry are preferablyselected to have matched or uniform impedance properties. For example,it is advantageous to use conductive tape 26, traces 38, and conductivelayers 36 that have substantially uniform impedance properties whencompared one to another. Matched impedance may reduce the noise andother interference that may be otherwise produced during the testingoperation, and may further allow reliable transmission of signalsbetween the testing circuitry and the integrated circuit, which becomesmore important as higher-speed integrated circuits are used. For theforegoing reasons, conductive tape is particularly useful in the presentinvention.

Using the contact structures 16 of this embodiment and other embodimentsof the invention, electrical connection may be established with leads 24substantially as near to body 22 as desired. The distance from body 22at which electrical connections are preferably established is determinedby the properties of integrated circuit package 20 and the desiredresults. However, in many cases, contact can be made with leads 24 asnear as a distance of about 25 microns from body 22 using this or otherembodiments of the invention. The dimensional precision of the siliconsubstrate can be plus or minus one (1) micron. Preferably, thedetermining factor, however, will be the tolerance and variation of thecorresponding semiconductor package, which is typically plus or minustwo (2) mils (plus or minus fifty (50) microns).

When an integrated circuit package 20 is disposed over interposer 10,there may need to be an apparatus for securing the integrated circuitpackage 20 in position. In FIG. 4, this is accomplished by means of aclamping apparatus 48 that is brought down on lead 24 on a side thereofopposite conductive layer 36. Alternatively, clamping apparatus 48 maybe placed in contact with body 22 or one of any number of othermechanisms may be used to secure integrated circuit package 20 inposition. In some cases, adequate electrical contact may be establishedand maintained without the assistance of a clamping apparatus or otherdevice that performs the same function.

FIG. 5 shows an electrical contact assembly similar to that of FIG. 4wherein the terminal contact points 30 are located at a positionseparate from the interposer. In this case, terminal contact points 30are not positioned on bottom face 28 of interposer 10 but are insteadlocated on a distal end of the segment of conductive tape 26. Accordingto the embodiment of FIG. 5, the segments of conductive tape 26 extendaway from body 12. This configuration is best used when leads 24 do notremain coplanar with body 12 but instead curve away therefrom, as seenin FIG. 5. This curvature of leads 24 provides clearance in which thesegments of conductive tape 26 may fan out away from body 12 instead ofbeing wrapped around the edges thereof. The segments of conductive tape26 or other conductive structures connected to traces 38 need not beformed as seen in FIG. 5, but instead may extend in substantially anydirection as desired. In other respects, the electrical contact assemblyof FIG. 5 may be similar to that of FIG. 4. FIG. 5 also illustrates themanner in which raised member 32 may be integrally formed from body 12.

As seen in FIG. 6, a group of contact structures 16 may optionally beformed on an insert module 50, which may be removably attached to body12 of an interposer. For example, insert module 50 supports a pluralityof contact structures 16 that are disposed over a surface thereof.Insert module 50 may be snap fitted, press fitted, or otherwiseremovably attached to a mating cavity 52 of body 12. Insert modules 50may be used so that contact structures 16 may be easily replaced whenone or more are damaged, instead of having to replace the entireinterposer. If insert modules 50 are used with the interposer, one ormore insert modules may be used to contact the leads of each edge of theintegrated circuit package.

FIG. 7 is a partial perspective view of an edge portion of an interposerstructure showing part of several traces 38, and further illustratesthree examples of methods for electrically connecting conductivestructures to traces 38. While three different conductive structures orconductive members are depicted in FIG. 7, it should be understood thatgenerally only one of these three or another suitable conductivestructure is selected for any given interposer. However, threealternative methods are presented here for purposes of illustration.

The first method involves soldering or otherwise permanently bonding awire-bonded lead 54 to trace 38. In the second method, conductive tape26 is attached to trace 38. Conductive tape 26 may include a polymericsubstrate 56 which may be a polyimide or other suitable material coatedon one or both sides by a conductive strip 58. For example, conductivetape 26 may be tape automated bonding (TAB) type conductive tape.Typically, conductive tape 26 is flexible to the extent that it can bebent and wrapped around corners. The third illustrated method involvesplacing non-bonded lead 60 in contact with trace 38 without formingapermanent bond. In general, the foregoing three examples of conductivestructures are understood by persons of ordinary skill in the art. Othermeans for electrically connecting traces 38 with external circuitry arecertainly within the scope of the invention.

FIG. 8 is an enlarged view of a preferred contact structure 16. Inparticular, it can be seen that conductive layer 36 is preferablyrelatively thin compared to the dimensions of raised member 32.Optionally, conductive layer 36 will be formed over one or moreprojecting apex structures 62 positioned thereon on a contact surface 64of top surface 34 of raised member 32. Preferably, apex structures 62are first formed in raised member 32, such as when raised member 32 isintegrally formed from body 12, and can be formed by an etching process.Then, conductive layer 36 is evenly deposited over apex structures 62.

When included in contact structure 16, the projecting apex structures 62facilitate the formation of an ohmic contact with a lead. For example,projecting apex structures 62 may slightly cut into the leads andpenetrate any oxide layer that might have been formed thereon. Apreferred method for forming projecting apex structures 62 is disclosedin U.S. Pat. No. 5,483,741 issued to Akram et al. which is incorporatedherein by reference for purposes of disclosure. Projecting apexstructures 62 may also act to securely position an integrated circuitpackage in place by at least partially restraining lateral motionthereof.

An alternative embodiment of the invention is illustrated in FIG. 9which is a partial perspective view of an edge portion of an interposerstructure 110. In this embodiment, the contact structures 116 do notinclude raised members, but instead comprise depressions 132 formed intoa substrate by any suitable method. For example, if body 122 consists ofsilicon or a silicon-containing material, depressions 132 may be formedtherein by etching or another micromachining operation. Accordingly,contact structures 116 are receding contact structures.

A conductive layer 136 is preferably formed on an inside surface ofdepression 132. In the embodiment of FIG. 9, this inside surface issubstantially coextensive with the bottom of depression 132. A trace 138preferably extends from conductive layer 136 and has an end 140 that canbe connected with conductive structures or other external circuitry. Thematerials used in conductive layers 136 and traces 138 may be the sameas conductive layers 36 and traces 38 of FIG. 4.

While a variety of dimensions and configurations of depression 132 maybe used, the primary factor for their selection is the dimensions of theleads that are to be disposed in depressions 132. Typically, depressions132 have an end that is adjacent to a nest 114 so as to provide anunobstructed opening by which leads may be disposed in depressions 132.

FIG. 10 illustrates an electrical contact assembly wherein leads 124 ofan integrated circuit package 120 are connected to contact structures116 of an interposer 110. It can be seen that electrical contact may beestablished with leads 124 at a location thereon as near as desired tobody 122 of the integrated circuit package 120. As in the previousembodiment, integrated circuit package 120 is preferably mechanicallyheld in place over interposer 110 such that electrical contact withleads 124 is maintained. Securing integrated circuit package 120 inplace may be accomplished by means of a clamping apparatus as depictedin FIG. 4. In this case, a clamping apparatus having an array ofcastellations that correspond to depressions 132 may need to be used inorder to make adequate contact with leads 124. Alternatively, airpressure may be used to hold integrated circuit package 120 in place. Asseen in FIG. 10, a vacuum via 166 may be formed through interposer 110to terminate at a surface of body 122. A vacuum source (not shown) maybe connected to vacuum via 166, thereby producing reduced pressuretherein relative to the ambient air pressure. The resulting vacuum holdsintegrated circuit package 120 in place over interposer 110.

The embodiment of FIGS. 9 and 10 is especially suitable when leads 124are curved so as to be easily placed within a depression 132. However,depressions 132 may be adjusted in order to receive an array of leadsthat lie within a plane.

In order to illustrate a further example of the manner in which thecontact structures of the invention may be adapted for substantially anychip package, FIG. 11 is a partial cross-sectional elevation view of yetanother embodiment of the invention, in which an interposer 210 has anarray of contact structures, some of which include raised members andsome of which include depressions. This arrangement may be used withintegrated circuit packages that have two or more sets of leads. Forexample, some integrated circuits have two lead frames that lie inplanes that are displaced one from another. In this case, depressions268 engage leads in one plane while raised members 270 engage leads inthe other plane. In other respects, interposer 210 may be substantiallysimilar to interposers 10 and 110 disclosed herein. The raised membersand depressions of the invention may be adapted as needed to conform tothe leads of specific integrated circuit packages and may be provided inany combination on an interposer structure.

Yet another embodiment of the invention is depicted in FIG. 12, whereinthe contact structures of the previous embodiments are replaced byconductive tape 326 and conductive bumps 372. Conductive tape 326 may bedisposed on interposer 310 so that it extends from one face ofinterposer 310 to the opposite face. Conductive bump 372 is built upover a conductive strip 358 of conductive tape 326 and provides acontact surface 364 that can electrically engage a lead 324. As in otherembodiments of the invention, conductive bumps 372 are preferablyarrayed over body 322 in a pattern that corresponds to the leads of theparticular integrated circuit package that is used. In other respects,the embodiment of FIG. 12 may be substantially similar to the otherembodiments disclosed herein, in that electrical contact may be madewith a lead substantially as close as desired to the body 322 of anintegrated circuit package 320. Moreover, reliable contact can be madewith an integrated circuit package having a very fine pitch. The pitchof terminal contact points 330 may be greater than the pitch of theleads 324 by staggering terminal contact points 330. The material usedin conductive bumps 372 may be the same as the material used in theconductive layers disclosed herein.

Any of the foregoing embodiments may be adapted for use with a varietyof testing practices and methods. One common testing method alreadydisclosed herein involves bringing an integrated circuit package intocontact with the interposers so that testing can be performed.Alternatively, the interposers disclosed herein may be adapted forcontacting integrated circuit packages that are held in a tray oranother similar collection. In particular, the interposers may belowered or positioned onto a stationary integrated circuit package whilethe testing operation is conducted, after which the interposers arelifted away. Still another variation involves providing a hingedassembly including an interposer and an opposable and pivotally attachedclamping apparatus. In this method, the integrated circuit package isplaced on the interposer and within the hinged assembly, while theclamping apparatus is pivoted onto the integrated circuit package. Inview of the foregoing, it should be understood that the interposers maybe adapted for use with substantially any testing practice or method.

The present invention may be embodied in other specific forms withoutdeparting from its spirit or essential characteristics. The describedembodiments are to be considered in all respects only as illustrativeand not restrictive. The scope of the invention is, therefore, indicatedby the appended claims rather than by the foregoing description. Allchanges which come within the meaning and range of equivalency of theclaims are to be embraced within their scope.

1. A method of making an interposer structure for providing electricalcommunication between an array of electrical leads of an integratedcircuit and external circuitry, the method comprising: providing asubstrate including a dielectric material; and forming an array ofcontact structures on said substrate, said array of contact structuresbeing sized and spaced so as to be capable of electrically engaging saidarray of electrical leads, wherein each of said contact structures isformed by: forming a depression into said substrate, said depressionhaving an inside surface defined thereon; forming a conductive layerdisposed over at least a portion of said inside surface of saiddepression; forming an electrical trace disposed over a surface of saidsubstrate; and electrically connecting said electrical trace with saidconductive layer, wherein said electrical trace comprises a conductivematerial so as to provide electrical communication between saidconductive layer and said external circuitry.
 2. The method of claim 1,wherein the substrate comprises a silicon-containing material.
 3. Themethod of claim 1, further comprising forming an array of terminalcontact points in electrical communication with said array of contactstructures, wherein: said array of contact structures has a first pitch;and said array of terminal contact points has a second pitch that isgreater than said first pitch.
 4. The method of claim 3, wherein: saidarray of terminal contact points is in electrical communication withsaid array of contact structures by conductive members selected from thegroup consisting of conductive tape, wirebonded leads, and non-bondedleads; and said conductive members are positioned in electrical contactwith said electrical traces.
 5. The method of claim 1, wherein formingthe depression into the substrate comprises conducting an etchingoperation on the substrate.
 6. The method of claim 1, wherein theconductive layer comprises a material selected from the group consistingof titanium, tungsten, beryllium, copper, gold, palladium, combinationsthereof, and alloys thereof.